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Modelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid media

dc.contributor.authorRuiz-Díez, Víctor
dc.contributor.authorHernando-García, Jorge
dc.contributor.authorToledo, Javier
dc.contributor.authorManzaneque, Tomás
dc.contributor.authorKucera, Martin
dc.contributor.authorPfusterschmied, Georg
dc.contributor.authorSchmid, Ulrich
dc.contributor.authorSánchez-Rojas, José Luis
dc.date.accessioned2024-02-05T08:29:29Z
dc.date.available2024-02-05T08:29:29Z
dc.date.issued2016-07-22
dc.identifier.issn09601317
dc.identifier.urihttps://hdl.handle.net/10115/29578
dc.description.abstractIn this work, roof tile-shaped modes of MEMS (micro electro-mechanical systems) cantilever resonators with various geometries and mode orders are analysed. These modes can be efficiently excited by a thin piezoelectric film and a properly designed top electrode. The electrical and optical characterization of the resonators are performed in liquid media and the device performance is evaluated in terms of quality factor, resonant frequency and motional conductance. A quality factor as high as 165 was measured in isopropanol for a cantilever oscillating in the seventh order roof tile-shaped mode at 2 MHz. To support the results of the experimental characterization, a 2D finite element method simulation model is presented and studied. An analytical model for the estimation of the motional conductance was also developed and validated with the experimental measurements.es
dc.language.isoenges
dc.publisherJournal of Micromechanics and Microengineeringes
dc.subjectMEMSes
dc.subjectpiezoelectrices
dc.subjectcantilever resonatores
dc.subjectFEMes
dc.subjectfluid-structure interactiones
dc.titleModelling and characterization of the roof tile-shaped modes of AlN-based cantilever resonators in liquid mediaes
dc.typeinfo:eu-repo/semantics/articlees
dc.identifier.doi10.1088/0960-1317/26/8/084008es
dc.rights.accessRightsinfo:eu-repo/semantics/restrictedAccesses


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